Bronkhorst氣體質(zhì)量流量控制器
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- 公司名稱 北京博諾格儀器有限公司
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- 廠商性質(zhì) 代理商
- 更新時(shí)間 2018/5/14 9:00:00
- 訪問次數(shù) 554
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| ACCURACY （ATCALIBRATIONUNDEROPERATINGCONDITIONS） | Standard 3F-Calibration: ±0.8% of reading plus ±0.2% of full scale Polynomial calibration: ±0.5% of reading plus ±0.1% of full scale |
| REPRODUCIBILITY | < 0.1% full scale |
| REPEATABILITY | < 0.2% of reading |
| RESPONSETIME | 1...2 sec. （faster on request） |
| CONTROL STABILITY | < ±0.1% full scale （typical for 1 ln/min N2） |
| PRESSURE SENSITIVITY | 0.1%/bar typ. N2 0.01%/bar typ. H2 |
| ATTITUDE SENSITIVITY | max. error 0.015% at 1 bar N2and 90°change |
| VIBRATION SENSITIVITY | negligible |
| TEMPERATURE SENSITIVITY | zero point approx. 0.05% of full scale/°C |
| SUPPLY VOLTAGE SENSITIVITY | zero at correct supply voltages （acc. to electr. data） |
| CONTROLVALVE | closes automatically at setpoint < 1% |
| LEAKINTEGRITY | tested < 2 x 10-9mbar l/s He |
| RF | CE approved design |
| MECHANICALPARTS | |
| PROCESSCONNECTIONS | see model number code; other on application |
| MATERIAL SOFCONSTRUCTION | stainless steel AISI 316L or comparable |
| SEALS | Viton, EPDM, elast. PTFE, other on application |
| SURFACE QUALITY | Ra 0.2...0.6 µm |
| OPERATING LIMITS | |
| RANGE | 2%...* |
| TYPESOFGASES | all gases compatible with AISI 316L |
| TEMPERATURE | -10 °C up to +70 °C |
| WARMING-UPTIME | 30 min. for optimum accuracy, 2 min. for accuracy ±2% of full scale |
| ELECTRICAL PROPERTIES | |
| SUPPLY VOLTAGE | mass flow meter +15 V...24 V, 50 mA mass flow controller +15 V, 250 mA -15 V, 30 mA mass flow controller +24 V, 190 mA |
| OUTPUT SIGNAL | 0...5 V, 0...10 V, 4…20mA |
| SETPOINT SIGNAL | 0...5 V, 0...10 V, 4…20mA |
| ELECTRICAL CONNECTION | 9-pin sub-D connector, cable length independent |
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